In 1664 the Lower Isenburg branch died out. The Büdingen line continued to partition, and by the beginning of the 19th Century the lines of Isenburg-Büdingen, Isenburg-Birstein, Isenburg-Meerholz and Isenburg-Wächtersbach existed. The Principality of Isenburg was created in 1806 when the princely Birstein line mediatised the comital others, and the principality itself was mediatised in 1814 by the Congress of Vienna with its territories annexed to the Grand Duchy of Hesse.